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鍍膜機
薄膜ITO卷繞式鍍膜機
上海羽天實業有限公司銷售韓國進口薄膜ITO卷繞式鍍膜機。改善的磁控濺射設備鍍的ITO薄膜厚度均勻度非常好，自己獨有的技術降低濺射薄膜粗糙度。不僅性能方面優越，性價比也非常高。
??1.設備規格-1
??◆ Material Thickness
??- PET : 25 ~ 200?
??◆ Roll Dimension
|
ITEM |
Min |
Max |
|
Witdh(膜寬幅) |
650mm |
1700mm |
|
Diameter |
|
900mm |
? ◆ Winding
|
ITEM |
Description |
|
Web Speed |
0.5 .. 10m/min |
|
Unwind |
70 … 300N |
|
Rewind |
70 … 300N |
??1.設備規格-2
??◆ Vacuum Condition (真空度規格)
|
No |
Description |
|
Base Pressure (基礎真空度) |
≤ 7.0 × 10-6 mbar 以下 |
|
Process Pressure (工程真空度) |
1 … 7 × 10-3 mbar |
|
Venting Time (排氣時間) |
Approx. 20minutes |
??1.網絡設備由PLC I/O系統控制，可以實時檢測( Profibus DP)??◆ Machine Control (設備控制)
??- Type Q-PLC (made by MITSUBISHI)
??2.卷繞驅動由AC servo driver system精密控制 (Tension Control)
??3. Data transfer : Profibus DP interface with fiber optics (TMP, MF)
??4. System Automation (系統自動化)
??- Pumping Function (Ramp up/down)
??- Deposition parameter storage(儲存鍍膜條件)
??- Automatic process stop (錯誤發生時)
??- 各產品自動升級(Recipe)
??2. 設備裝置-1
??◆ Dimensions & Weight
|
ITEM |
Description |
|
System Lay Out |
Approx. 18000mm×22000mm |
|
Width (Chamber) |
Approx. 8100mm |
|
Height (Chamber) |
Approx. 3500mm |
|
Weight (Chamber) |
Approx. 40,000kg |
??◆ Electrical services???2Drum腔體為基準，根據設備規格裝置也會變更。
|
ITEM |
Description |
|
Voltage |
380v ±10%, 50Hz, 3 Phase |
|
Average consumption |
Approx. 500kw |
??◆ Cooling Water Spec (冷卻水裝置)??
2. 設備裝置-2
|
ITEM |
Description |
|
Inlet pressure (輸入壓力) |
4……6 bar |
|
Outlet pressure (輸出壓力) |
0.1…..1 bar, open drain |
|
Consumption |
Max. 70m3/h Average 50 m3/h |
|
Temperature (Inlet) 輸入溫度 |
Min : 17℃, Max : 23℃ |
|
Carbonate hardness 碳酸鹽硬度 |
＜ 6 … 8′dh
|
|
pH valus |
8.5 … 10 |
|
CO2 content |
Max 15 mg/l |
|
Cl content |
Max 20 mg/l |
?◆ Compressed air (空氣)?
?2. 設備制造-3
|
ITEM |
Description |
|
Pressure (壓力) |
6 … 7 bar |
|
Average consumption |
Approx. 1 m3/h |
|
Oil content |
Max. 6 mg/m3 |
??◆. 腔體構造
??◆. Cathode & Cooling Drum 構造
??◆ PEM system 持有控制技術
